Tender for FTIR monitoring solution for DRE in semiconductor gaseous abatement systems

The Faculty of Science and Engineering at Swansea University is seeking to procure a complete, turnkey FTIR-based system for determining Destruction or Removal Efficiency (DRE) of semiconductor point-of-use abatement systems. This equipment will be housed in the Centre for Integrative Semiconductor Materials (CISM) at Swansea Universities Bay Campus.

The existing abatement system installed in CISM, is currently unmonitored in terms of DRE, and a there is an urgent requirement to have continuous DRE monitoring to inform both process and abatement experiments and drive efficiency improvements. Additionally, a new abatement system is being installed, and DRE will be compared between the new and existing systems using the new FTIR capability.

External funding is being sought from the Welsh Governments SMART Capital scheme for a fixed maximum budget of GBP 150,000 excluding VAT which includes all delivery and service contract costs. This investment will support multiple active grants and is essential for both submitted and planned research proposals. Due to the funding programme's tight expenditure deadline, this tender has been published in advance of the funding decision. Any contract award resulting from this tender will be conditional upon the funding being approved and awarded.