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Belgium – Laboratory, optical and precision equipments (excl. glasses) – Advanced Lithography EUV Scanner

Tender opportunity published by UK public sector buyer on TenderSignal, the UK public sector tender monitoring platform.

Contracting Authority
UK public sector buyer
Region
Belgium
Contract Type
29
Source
TED

The Low NA scanner is a state-of-the-art EUV scanner enabling exploration and further expansion of the EUV patterning, using exploratory materials and novel designs, in the logic and memory devices. Next to the resolution the low NA-scanner can give the improved overlay performance and throughput ar

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