Fluorine-CryoRIE System
Kungliga Tekniska högskolan
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Procurement
- 31000000 Electrical machinery, apparatus, equipment and consumables; lighting
What happened
Kungliga Tekniska högskolan awarded this contract to Oxford Instruments Nanotechnology Tools Ltd worth £389,500 on 2 Feb 2021.
Description
KTH and Albanova Nanolab intends to purchase a new RIE/ICP system (equipped with load-lock and cryo-stage) dedicated to fluorine based processing. The main use of the tool will be to reactively etch dielectrics, metals, and various superconductors, as well as low pressure argon milling of inert materials. The system should be able to perform high-quality anisotropic, deep silicon etching.
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External ID: ot-ocds-70d2nz-ccf5333b-3e8c-4210-93ea-d6d9b7e9e54e • Added 12 May 2026