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Finland – Laboratory, optical and precision equipments (excl. glasses) – Plasma enhanced chemical vapour deposition tool

Tender opportunity published by UK public sector buyer on TenderSignal, the UK public sector tender monitoring platform.

Contracting Authority
UK public sector buyer
Region
Finland
Contract Type
25
Source
TED

THE SUBJECT OF THE PROCUREMENT The subject of the procurement is a plasma-enhanced automated cassette to cassette chemical vapor deposition (PECVD) system for deposition of dielectric thin films (SiO₂, SiN, TEOS, SiON, a Si) for research and pilot line use in the VTT Micronova cleanroom. DIRECT AWAR

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