Tender opportunity published by UK public sector buyer on TenderSignal, the UK public sector tender monitoring platform.
THE SUBJECT OF THE PROCUREMENT The subject of the procurement is a plasma-enhanced automated cassette to cassette chemical vapor deposition (PECVD) system for deposition of dielectric thin films (SiO₂, SiN, TEOS, SiON, a Si) for research and pilot line use in the VTT Micronova cleanroom. DIRECT AWAR