200mm High Performance Electron Beam Lithography System
University Of Southampton
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Key details
Procurement
- 38000000 Laboratory, optical and precision equipments (excl. glasses)
What happened
University Of Southampton awarded this contract to JEOL(U.K.)LIMITED worth £3,138,991 on 22 Dec 2022. The contract runs until 17 Nov 2038.
Description
The University is looking to procure a new 200mm capable high throughput Electron Beam Lithography (EBL) Write Tool for the Southampton Nanofabrication Centre, to be used by researchers, students, and the wider UK academic community to provide a state-of-the-art nanometer scale lithography service. The user base for the new instrument will be approximately 40 users.
Tenders or requests to participate must be submitted electronically via the University's electronic tendering portal, In Tend, found at the following address: https://in-tendhost.co.uk/universityofsouthampton/aspx/home
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External ID: cf-ocds-b5fd17-fb32f4cc-f9ec-43b5-a8d4-e0d4c5c3ed8d • Added 4 October 2026