Electron Beam Evaporator

To complement our lithography capabilities the Southampton Nanofabrication Centre (SNC) is looking to invest in an electron beam evaporator capable of partnering with current tools to deliver high quality 200mm wafer lift off processing. Lift off is a technique which underpins multiple high value and strategic projects for the facility, and we wish to renew our capability for another generation to partner with our next wave of lithography investment.

To complement our lithography capabilities the Southampton Nanofabrication Centre (SNC) will invest in an electron beam evaporator capable of partnering with current tools to deliver high quality 200mm wafer lift off processing. Lift off is a technique which underpins multiple high value and strategic projects for the facility and we wish to renew our capability for another generation to partner with our next wave of lithography investment. Specifically, we expect a future DUV (Deep Ultra Violet) scanner lithography critical dimension of 200nm and for 4nm for electron beam write.

The primary focus of the procurement is to deliver a tool capable of high resolution 200mm wafer lift off in conjunction with a critical dimension of 4nm.

The University is conducting this procurement using the Open procedure in accordance with the requirements of the Regulations for the purpose of procuring the goods and services described in the Specification. The University proposes to enter into a contract for up to two years with the successful tenderer.

This will comprise of a contract period of up to one year for the delivery lead-time of the goods followed by a 12-month warranty.

The contract will be effective on signing. The term of the warranty will run for 12 months from the date of acceptance of the goods by the University.

Contract Value: The estimated value of the is £666,000 GBP excluding VAT. Whilst bidders are expected to provide a proposal that falls within this budget, for the benefit of doubt, the University reserves the right to automatically exclude any bidders whose proposal exceeds this figure. All related components, delivery, installation, commissioning, training, services, and maintenance MUST be included within the proposal. Details of current expenditure or potential future uptake are given as a guide based on past purchasing and current planning to assist you in the preparation of your Tender. They should not be interpreted as an undertaking to purchase any goods or services to any particular value and do not form part of the Contract. This procurement is not suitable for splitting into lots. The risk of dividing the requirement into Lots would render the execution of the contract excessively technically difficult, not cost effective and would undermine proper execution of the contract.