200mm Capable High Resolution Imaging Equipment

The University of Southampton Zepler Cleanrooms were looking to purchase in a 200mm wafer capable, ultra-high resolution scanning electron microscope (UHR-SEM). The equipment will deliver efficient fabrication at the wafer scale, process waste reduction and sustainable resource management via enabling of routine imaging and materials analysis, whilst remaining accessible in terms of ease of operation and training for a diverse user base at the academic research level. The proposed equipment is a state-of-the art sub-nanometre, ultra-high resolution scanning electron microscope for fast imaging time to results, shortening the inspection loop in wafer-scale device fabrication, and maintaining the quality of material platforms and lithographic tolerances.

By acquiring this equipment, the Zepler Cleanrooms intend:

• To be a centre for wafer-scale analysis of material, device performance, and fabrication quality management
• To be an integral part of the UK semiconductor fabrication ecosystem that supports 200mm wafer-scale processing.
• To provide national semiconductor research and development capability of high- throughput inspection and process yield evaluation for up to 200mm wafers.